发明名称 METHOD OF MANUFACTURING MULTI-LAYER THIN FILM, MEMBER INCLUDING THE SAME AND ELECTRONIC PRODUCT INCLUDING THE SAME.
摘要 Disclosed herein is a method of forming a multilayer thin film by depositing target particles, detached from a target by plasma discharge of inert gas, on a metal object using a multilayer thin film deposition apparatus and a multilayer thin film formed by the method. More specifically, a sputtering deposition apparatus is used as the multilayer thin film deposition apparatus. The method includes coating a metal object with a coating layer, depositing at least one hardness-enhancing layer on the coating layer, and depositing a color layer on the at least one hardness-enhancing layer.
申请公布号 MX2015014977(A) 申请公布日期 2016.02.05
申请号 MX20150014977 申请日期 2014.05.13
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JIN HYUN CHO;JIN SUB KIM;HYUN JUN JUNG;HYONG JUN YOO;MIN CHUL JUNG
分类号 C23C28/00;B32B15/08;C23C14/34 主分类号 C23C28/00
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