发明名称 |
METHOD OF MANUFACTURING MULTI-LAYER THIN FILM, MEMBER INCLUDING THE SAME AND ELECTRONIC PRODUCT INCLUDING THE SAME. |
摘要 |
Disclosed herein is a method of forming a multilayer thin film by depositing target particles, detached from a target by plasma discharge of inert gas, on a metal object using a multilayer thin film deposition apparatus and a multilayer thin film formed by the method. More specifically, a sputtering deposition apparatus is used as the multilayer thin film deposition apparatus. The method includes coating a metal object with a coating layer, depositing at least one hardness-enhancing layer on the coating layer, and depositing a color layer on the at least one hardness-enhancing layer. |
申请公布号 |
MX2015014977(A) |
申请公布日期 |
2016.02.05 |
申请号 |
MX20150014977 |
申请日期 |
2014.05.13 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JIN HYUN CHO;JIN SUB KIM;HYUN JUN JUNG;HYONG JUN YOO;MIN CHUL JUNG |
分类号 |
C23C28/00;B32B15/08;C23C14/34 |
主分类号 |
C23C28/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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