| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional coordinate measurement device and a three-dimensional coordinate measurement method that can highly accurately perform a measurement even when a rotation of an emission part of laser light is deviated from a rotation center.SOLUTION: A three-dimensional coordinate measurement device 17 comprises: a light source 20; an optical splitting unit 22; a head part 15; an emission direction control unit 30; an optical member 47 that has a spherical reflection surface with a rotation center 10 of the head part 15 as a center of curvature, and causing a part of measurement light 36 to be regularly reflected; an optical detection unit 26 that detects a first optical interference signal with reference light 35 with first regular reflection measurement light 36a regularly reflected by the optical member 47 and a second optical interference signal with the reference light with second regular reflection measurement light 36b regularly reflected by a measurement object 9; a distance calculation unit 53 that calculates a distance to the measurement object 9 from the reflection surface of the optical member 47; and a position coordinate calculation unit 54 that calculates a three-dimensional coordinate of the measurement object when the center of curvature of the optical member is defined as an origin.SELECTED DRAWING: Figure 2 |
