SOFT X-RAY GENERATION APPARATUS HAVING IMPROVED ANTI-STATIC RANGE AND HEAT-DISSIPATION FUNCTION

摘要

The present invention relates to a soft x-ray generation apparatus having an improved anti-static range and a heat-dissipation function. The soft x-ray generation apparatus according to the present invention comprises: a filament for emitting electrons; a collimation part for collimating the electrons emitted from the filament; a beryllium window wherein an x-ray generating material is coated on one surface thereof such that if the collimated electrons collide, x-rays are emitted through another surface thereof; a supporting part made of a metal material for providing support around the beryllium window; and a valve made of a metal material for radiating heat that is generated in the beryllium window and transferred through the supporting part, wherein the supporting part is coupled to a front surface thereof.