VIBRATION-APPLYING DEVICE, ELECTRODYNAMIC ACTUATOR, CROSSED GUIDEWAY, LINEAR GUIDEWAY, AND VIBRATING TABLE

摘要

A vibration-applying device in one embodiment of this invention is provided with a vibrating table, an x-axis vibration-applying unit that makes the vibrating table vibrate along an x-axis, a y-axis vibration-applying unit that makes the vibrating table vibrate along a y-axis, a z-axis vibration-applying unit that makes the vibrating table vibrate along a z-axis, a first linear guideway that couples the vibrating table and the z-axis vibration-applying unit together so as to be able to slide along the x-axis, and a second linear guideway that couples the vibrating table and the z-axis vibration-applying unit together so as to be able to slide along the y-axis. The x-axis linear guideway has an x-axis rail that extends along the x-axis and an x-axis carriage that engages with said x-axis rail so as to be able to slide along the x-axis, and the y-axis linear guideway has a y-axis rail that extends along the y-axis and a y-axis carriage that engages with said y-axis rail so as to be able to slide along the y-axis. The x-axis carriage is directly affixed to the y-axis carriage.