| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device which can save the cost.SOLUTION: A processing device 1 comprises: a chuck table 40; processing means 50; a cassette 10; a cassette table 3; transportation means 30 which imports and exports a work-piece W onto and from the chuck table 40; and control means 100 which controls each component. The control means 100 comprises detection means 101 which detects the change or a position of the component, and the detection means 101 comprises imaging means 110 which takes an image of the component; storage means 120 which stores an image taken of the component in a prescribed state or positioned at a prescribed position, as a reference image; and determination means 130 which compares the reference image stored in the storage means 120 and an additional image taken of the component, and determines whether the reference image matches the image additionally taken. If the determination means 130 determines that the images match with each other, the component is detected to be in a prescribed state or at a prescribed position.SELECTED DRAWING: Figure 1 |
