MANUFACTURING METHOD OF IMPRINT MOLD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an imprint mold capable of removing a foreign substance deposited on a pattern formation surface of a manufactured imprint mold without generating missing or the like in fine uneven patterns on the imprint mold.SOLUTION: The manufacturing method of the imprint mold includes: applying etching processing to an imprint mold substrate which includes a first surface and a second surface confronting the first surface and with which a metal film pattern is provided at the side of the first surface, and forming the fine uneven patterns on the first surface side of the imprint mold substrate; inspecting the presence/absence of the foreign substance on the first surface side of the imprint mold substrate with which the fine uneven patterns are formed; making a region including the foreign substance on the first surface side of the imprint mold substrate into contact with an active energy ray-curable resin ; semi-curing the active energy ray-curable resin and isolating the imprint mold substrate from the semi-cured active energy ray-curable resin.SELECTED DRAWING: Figure 2