PROBE UNIT, METHOD OF MANUFACTURING PROBE UNIT, AND TESTING METHOD

摘要

A probe unit includes a probe pin and a support unit supporting the probe pin. The support unit includes first and second arms disposed at a distance along a direction in which the probe pin probes a probed object; a holding unit holding base ends of the arms; and a linking unit attached to the probe pin and linking front ends of the arms. The support unit constructs a four-bar linkage that permits linear or approximately linear movement of the probe pin in an opposite direction to the probing direction. The first and second arms have through-holes at positions slightly closer to the front ends than the base ends and positions slightly closer to the base ends than the front ends, center parts between the through-holes function as bars in the four-bar linkage, and formation positions of the through-holes function as joints in the four-bar linkage.

主权项

1. A probe unit comprising a probe pin and a support unit that supports the probe pin,
wherein the support unit includes: a strip-like first arm and a strip-like second arm disposed so as to face one another at a distance along a direction of probing when the probe pin is caused to probe a probed object; a holding unit that holds base end portions of the first and second arms; and a linking unit that is constructed so as to be attachable to the probe pin and that links front end portions of the first and second arms together, the support unit constructing a four-bar linkage where linear movement or approximately linear movement of the probe pin in an opposite direction to the direction of probing is permitted, and the first and second arms are constructed so that through-holes are formed at a position that is slightly closer to the front end portion than the base end portion and a position that is slightly closer to the base end portion than the front end portion, center parts between the through-holes function as bars that construct the four-bar linkage, and formation positions of the through-holes function as joints that construct the four-bar linkage.