PROCESSING APPARATUS FOR GLASS SUBSTRATE

摘要

An apparatus of processing a glass substrate according to the present invention includes: a substrate holding member for holding the glass substrate; a first substrate transfer member for transferring the glass substrate from the substrate holding member; a substrate loading member for loading the glass substrate transferred from the first substrate transfer member in a height direction; a second substrate transfer member for transferring plural glass substrates which are loaded in the height direction from the substrate loading member at a time; a process chamber member for performing a heat treatment process on the glass substrate while receiving a plurality of glass substrates transferred by the second substrate transfer member in a height direction; and a substrate discharge member for discharging the glass substrate on which a heat treatment process has finished by the process chamber member to the outside. The present invention enables process treatment to be performed on glass substrates with various sizes. Further, the present invention can dramatically improve treatment yield by performing a transfer process and a process treatment process on a plurality of glass substrates at the same time.