| 摘要 |
PROBLEM TO BE SOLVED: To provide an environment system for controlling an environment of a gap between an optic assembly and a device.SOLUTION: A fluid barrier (254) is positioned in the vicinity of a device (30), and an immersion fluid system (252) supplies an immersion fluid (248) for filling a gap (246). The immersion fluid system (252) recovers the immersion fluid (248) directly existing between the fluid barrier (254) and the device (30), the fluid barrier (254) may include a discharge inlet positioned in the vicinity of the device (30), and the immersion fluid system (252) may include a low pressure source communicated to the discharge inlet. An environmental system (26) includes a bearing fluid source for directing a bearing fluid to between the fluid barrier (254) and the device (30).SELECTED DRAWING: Figure 2B |
