| 主权项 |
1. An integrated transport device for a wafer carrier, comprising:
an evacuatable chamber for accommodating therein a wafer carrier having a front opening with a cover, said chamber having a rear opening with a gate valve, said rear opening with the gate valve being adapted to communicate gas-tightly with the interior of a wafer-handling chamber; a platform for placing the wafer carrier thereon in the chamber, said platform being rotatable so as to set the wafer carrier at a first position for opening and closing the cover and at a second position for transporting wafers between the wafer carrier and the wafer-handling chamber; and an opening/closing device for opening and closing the cover of the wafer carrier placed on the platform at the first position, said opening/closing device comprising an internal part provided inside the chamber and an external part provided outside the chamber, said internal part being extendable and retractable for opening and closing the cover, said external part actuating movement of the internal part. |
