METHOD AND APPARATUS FOR HOT JET TREATMENT

摘要

A heating device (100) for heating the surface of a substrate (140). The heating device comprises a gas source (110) comprising an inert material supply inert under the operating conditions of the heating device, the gas source being adapted for supplying a hot jet of a gas comprising at least elements of said inert material on the substrate (140). The gas source (110) is adapted for heating the hot jet of the gas to a temperature above 1500°C.