| 摘要 |
PROBLEM TO BE SOLVED: To provide a process modeling technique that uses a single statistical model, such as a PLS, PRC or MLR model, developed from historical data for a typical process so as to perform quality prediction or fault detection for various process states.SOLUTION: The modeling technique determines means (and possibly standard deviations) of process parameters for each of a set of product grades, throughputs, etc., compares on-line process parameter measurements to these means and uses the compared values in a single process model so as to perform quality prediction or fault detection across the various states of the process. Because only the means and standard deviations of the process parameters of the process model are updated, a single process model can be used to perform quality prediction or fault detection while the process is operating in any of the defined process stages or steps. Moreover, the sensitivity (robustness) of the process may be manually or automatically adjusted for each process parameter to tune or adapt the model over time.SELECTED DRAWING: Figure 3 |
