发明名称 Method & System For Real-Time In-Process Measurement Of Coating Thickness
摘要 The present disclosure is generally directed to methods and systems for measuring the thickness of coatings or thin films on various substrates. For example, one disclosed method includes the steps of providing and directing light waves of varying wavelengths toward a moving substrate comprising a coating, linearly polarizing the light waves, converting the linearly polarized light waves to circularly polarized light waves, analyzing elliptically polarized light waves reflected by the moving substrate, capturing analyzed light waves, generating light wave data based on the captured light waves, and determining a thickness of the coating based on the light wave data.
申请公布号 US2016033259(A1) 申请公布日期 2016.02.04
申请号 US201414781457 申请日期 2014.03.14
申请人 SENSORY ANALYTICS 发明人 Komaragiri Vivek;Frisby Greg
分类号 G01B11/06 主分类号 G01B11/06
代理机构 代理人
主权项 1. A method comprising: providing and directing light waves of varying wavelengths toward a moving substrate comprising a coating; linearly polarizing the light waves; converting the linearly polarized light waves to circularly polarized light waves; analyzing elliptically polarized light waves reflected by the moving substrate; capturing analyzed light waves; generating light wave data based on the captured light waves; and determining a thickness of the coating based on the light wave data.
地址 Greensboro NC US