ACOUSTIC RESONATOR AND METHOD OF MANUFACTURING THE SAME

摘要

An acoustic resonator is provided in which loss of acoustic waves in a transverse direction may be reduced through a cavity formed in an acoustic resonance unit including a first electrode, a piezoelectric layer, and a second electrode, and in which acoustic waves in a longitudinal direction may be reduced by forming an air gap between the acoustic resonance unit and a substrate. Whereby, a quality factor may be improved.

主权项

1. An acoustic resonator comprising:
an acoustic resonance unit including a first electrode, a second electrode, and a piezoelectric layer positioned between the first electrode and the second electrode; a substrate provided below the acoustic resonance unit; and an air gap provided between the acoustic resonance unit and the substrate and reflecting acoustic waves generated by the acoustic resonance unit, wherein at least one of the first electrode and the second electrode, and the piezoelectric layer have a cavity formed therebetween.