FLOW RATE CONTROL APPARATUS, STORAGE MEDIUM STORING PROGRAM FOR FLOW RATE CONTROL APPARATUS AND FLOW RATE CONTROL METHOD

摘要

In order to keep a stable flow rate at a set flow rate value when a pressure fluctuation occurs in an upstream side of a valve, without providing an additional sensor for detecting a pressure fluctuation, a flow rate control apparatus is provided with: the valve; a flow rate sensor; a valve control part configured to control the valve so that a deviation between a set flow rate value and a measurement flow rate value is reduced, on the basis of the deviation and a set control coefficient; and a control coefficient setting part configured to set the control coefficient so that when a pressure rise occurs in the upstream side of the valve, a decreased amount in flow due to a decreased opening of the valve and an increased amount in flow due to an increased amount of a differential pressure before and after the valve, are balanced.

主权项

1. A flow rate control apparatus comprising:
a valve provided on a flow path where fluid flows; a flow rate sensor provided on an upstream side of the valve in the flow path; and a valve control part configured to control the valve so that a deviation is reduced, based on the deviation and a control coefficient which is set, wherein the deviation is a difference between a set flow rate value and a measurement flow rate value measured by the flow rate sensor, and the control coefficient is a value which is set so that, in the case where a pressure rise due to disturbance occurs in the upstream side of the valve, a decreased amount in flow due to disturbance and an increased amount in flow due to disturbance are substantially balanced,
the decreased amount in flow due to disturbance is a decreased amount of a flow rate corresponding to a decreased amount of an opening position of the valve in the case where the pressure rise due to disturbance occurs in the upstream side of the valve, andthe increased amount in flow due to disturbance is an increased amount of a flow rate corresponding to an increased amount of a differential pressure before and after the valve in the case where the pressure rise due to disturbance occurs in the upstream side of the valve.