REGISTRATION OF CAD DATA WITH SEM IMAGES

摘要

A method for image processing includes providing a microscopic image of a structure fabricated on a substrate and computer-aided design (CAD) data used in fabricating the structure. The microscopic image is processed by a computer so as to generate a first directionality map, which includes, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes. The CAD data are processed by the computer so as to produce a simulated image based on the CAD data and to generate a second directionality map based on the simulated image. The first and second directionality maps are compared by the computer so as to register the microscopic image with the CAD data.

主权项

1. A method for image processing, comprising:
providing a microscopic image of a structure fabricated on a substrate and computer-aided design (CAD) data used in fabricating the structure; processing the microscopic image by a computer so as to generate a first directionality map, which comprises, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes; processing the CAD data by the computer so as to produce a simulated image based on the CAD data and to generate a second directionality map based on the simulated image; and comparing the first and second directionality maps by the computer so as to register the microscopic image with the CAD data.