发明名称 PACKAGING SYSTEM AND PACKAGING METHOD FOR LASER-SEALED GLASS PACKAGE
摘要 A packaging system and packaging method for laser-sealing a glass package; a laser emitted by a laser device (1) is projected via a laser scanning unit (4) on a sealed glass package to be packaged and heats the same, the laser being capable of periodic quick scanning to achieve synchronous packaging and improving uniformity of a temperature field and improving productivity while diversifying packaging patterns. Further, a portal frame (3) can be provided with one or more laser scanning units (4), and can step to drive the laser scanning units (4) to move, and thereby can locally package a large sealed glass package to be packaged, or simultaneously package a plurality of sealed glass packages to be packaged, thus improving productivity.
申请公布号 WO2016015514(A1) 申请公布日期 2016.02.04
申请号 WO2015CN79905 申请日期 2015.05.27
申请人 SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. 发明人 CHENG, LEILI
分类号 H01L51/56 主分类号 H01L51/56
代理机构 代理人
主权项
地址