发明名称 Discrete MEMS Including Sensor Device
摘要 A micro electro mechanical system (MEMS) microphone includes a base; a MEMS device disposed on the base, the MEMS device comprising a diaphragm and a back plate; a condition sensor disposed on the base; and an integrated circuit coupled to the condition sensor and the MEMS device. The MEMS device operates to detect acoustic signals in a first frequency range and the condition sensor acts as a condition sensor in the first frequency range. The condition sensor acts as a microphone in a second frequency range and the MEMS device is unused so as to extend the operating range and acoustic overload point of the MEMS device.
申请公布号 US2016037245(A1) 申请公布日期 2016.02.04
申请号 US201514792821 申请日期 2015.07.07
申请人 Knowles Electronics, LLC 发明人 Harrington Brandon
分类号 H04R1/08 主分类号 H04R1/08
代理机构 代理人
主权项 1. A micro electro mechanical system (MEMS) microphone, comprising: a base; a MEMS device disposed on the base, the MEMS device comprising a diaphragm and a back plate; a condition sensor disposed on the base; an integrated circuit coupled to the condition sensor and the MEMS device; wherein the MEMS device operates to detect acoustic signals in a first frequency range and the condition sensor acts as a condition sensor in the first frequency range; wherein the condition sensor acts as a microphone in a second frequency range and the MEMS device is unused so as to extend the operating range and the acoustic overload point of the MEMS device.
地址 Itasca IL US