| 摘要 |
PROBLEM TO BE SOLVED: To provide a filming apparatus comprising: a cylindrical evaporation source having an internal space for accommodating a processed product; and a closure member for closing the internal space, wherein the ions discharged from the evaporation source by an arc discharge are deposited on the surface of a processed product, wherein the discharge is stabilized to suppress the Joule heat to be generated in the closure member.SOLUTION: A filming apparatus is provided, along the inner wall face 1a of an evaporation source 1, with an auxiliary electrode 3, to which there is applied a ground or positive voltage enabling the electrons e of an internal space 1A of an evaporation source 1 to flow thereinto.SELECTED DRAWING: Figure 2 |
