INTEGRATED MICROELECTROMECHANICAL SYSTEM DEVICES AND METHODS FOR MAKING THE SAME

摘要

Integrated Microelectromechanical System (“MEMS”) devices and methods for making the same. The integrated MEMS device comprises a substrate (200) with first electronic circuitry (206) formed thereon, as well as a MEMS filter device (100). The MEMS filter device has a transition portion (118) configured to (a) electrically connect the MEMS filter device to second electronic circuitry and (b) suspend the MEMS filter device over the substrate such that a gas gap exists between the substrate and the MEMS filter device. The transition portion comprises a three dimensional hollow ground structure (120) in which an elongate center conductor (122) is suspended. The RF MEMS filter device also comprises at least two adjacent electronic elements (102/110) which are electrically isolated from each other via a ground structure of the transition portion, and placed in close proximity to each other.

主权项

1. A method for making an integrated Microelectromechanical Systems (“MEMS”) device, comprising:
forming first electronic circuitry on a major surface of a substrate; forming a MEMS filter structure on the major surface of the substrate; and removing at least one first resist layer from the MEMS filter structure to form (a) a MEMS filter device suspended over the major surface of the substrate exclusively by a transition portion electrically connecting the MEMS filter device to the first electronic circuitry, and (b) a gas gap between the MEMS filter device and the major surface of the substrate.