发明名称 |
METHOD OF MANUFACTURING FILM FORMATION SUBSTRATE, AND METHOD OF MANUFACTURING ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE |
摘要 |
A vapor deposition device (50) in accordance with the present invention includes: a vapor deposition source (80) which has a plurality of injection holes (81) from which vapor deposition particles are to be injected towards a film formation substrate (60); a plurality of pipes (83a and 83b); a vapor deposition source crucible (82) for supplying the vapor deposition particles to the vapor deposition source (80); and moving means for moving the film formation substrate (60) relative to the vapor deposition source (80). The pipes (83a and 83b) are connected to first and second sides of the vapor deposition source (80) on one end side and the other end side, respectively, of a line of the injection holes (81). |
申请公布号 |
US2016036008(A1) |
申请公布日期 |
2016.02.04 |
申请号 |
US201514879090 |
申请日期 |
2015.10.08 |
申请人 |
Sharp Kabushiki Kaisha |
发明人 |
SONODA Tohru;KAWATO Shinichi;INOUE Satoshi;HASHIMOTO Satoshi |
分类号 |
H01L51/56;H01L51/00;H01L51/52 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Osaka JP |