SEMICONDUCTOR DEVICE

摘要

A semiconductor device includes a plurality of bit lines that intersect an active region on a substrate and extend in a first direction, a contact pad formed on the active region between adjacent bit lines, and a plurality of spacers disposed on sidewalls of the plurality of bit lines. An upper portion of the contact pad is interposed between adjacent spacers, and a lower portion of the contact pad has a width greater than a distance between adjacent spacers.

主权项

1. A semiconductor device comprising:
a first bit line intersecting an active region on a substrate, the first bit line extending in a first direction; a second bit line on the substrate, the second bit line being spaced apart from the first bit line and extending in the first direction; a buried insulation layer between the substrate and the second bit line, the buried insulation layer extending in the first direction; a first spacer structure on a sidewall of the first bit line; a second spacer structure on a sidewall of the second bit line; and a contact pad on the substrate, the contact pad being between the buried insulation layer and a lower portion of the first spacer structure.