AMORPHOUS THIN FILM FOR SENSING

摘要

An apparatus and method for low-power sensing, for example, sensing of chemical or biochemical analytes in a gas or liquid phase are disclosed. One aspect relates to the use of a thin continuous film without grain boundaries as a sensing layer in devices for sensing a predetermined analyte and to low power devices having such sensing layer. The sensing layer has a surface exposed to the analyte. The electrical impedance of the sensing layer changes upon adsorption of the predetermined analyte on the exposed surface of the sensing layer. The sensing layer may have a thickness in the range between about 1 nm and 100 nm, such as between about 1 nm and 30 nm. The sensing layer may be an amorphous layer.

主权项

1. A low power device for sensing a predetermined analyte, the device comprising:
a sensing layer having a surface in use exposed to the predetermined analyte, wherein the electrical impedance of the sensing layer changes upon adsorption of the predetermined analyte on the exposed surface of the sensing layer, wherein the sensing layer is an amorphous thin continuous film without grain boundaries; and a field electrode separated from the exposed surface of the sensing layer by a gap, the field electrode configured to apply an electric field over the sensing layer, thereby electrically controlling adsorption and desorption of the predetermined analyte at the exposed surface of the sensing layer; wherein the gap between the field electrode and the sensing layer comprises a local environment of the sensor.