ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, AND DISPLAY DEVICE

摘要

An array substrate and manufacturing method thereof, and a display device; the method of preparing an array substrate (01) comprises: forming, on a base substrate, a gate pattern (10), a gate insulating layer pattern (20) and a metal oxide semiconductor active layer pattern (30); forming an etching stop layer (40a); forming a pixel electrode pattern (70) and then a source electrode pattern (801) and a drain electrode pattern (802), the pixel electrode pattern (70) being connected to the metal oxide semiconductor active layer pattern (30) via the source electrode pattern (801) or the drain electrode pattern (802), thereby avoiding connection failure between the pixel electrode pattern (70) and the source electrode pattern (801) or the drain electrode pattern (802) due to surface oxidization when the source electrode pattern (801) and the drain electrode pattern (802) are made of highly active materials.