发明名称 COLLIMATION EVALUATION DEVICE AND COLLIMATION EVALUATION METHOD
摘要 When light that has passed through a second reflective member 20 is incident on a first reflective member 10, part of said light is reflected by a first reflective surface 11, the part of said light that passed through the first reflective surface 11 is reflected by a second reflective surface 12, and these reflected-light components are outputted in opposite directions. When the light outputted from the first reflective member 10 is incident on the second reflective member 20, part of said light is reflected by a first reflective surface 21, the part of said light that passed through the first reflective surface 21 is reflected by a second reflective surface 22, and these reflected-light components are outputted. The light L12 reflected by the first reflective surface 11 of the first reflective member 10 and the second reflective surface 22 of the second reflective member 20 and the light L21 reflected by the second reflective surface 12 of the first reflective member 10 and the first reflective surface 21 of the second reflective member 20 form an interference pattern on a screen 30. This implements a device and a method whereby the collimation of light can be evaluated with high sensitivity even if the coherence length of said light is short.
申请公布号 WO2016017706(A1) 申请公布日期 2016.02.04
申请号 WO2015JP71528 申请日期 2015.07.29
申请人 HAMAMATSU PHOTONICS K.K. 发明人 OKUMA JUNJI;IGASAKI YASUNORI
分类号 G01J9/02;G01B9/02;G01M11/00 主分类号 G01J9/02
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