发明名称 |
METHOD FOR MANUFACTURING FINE CANTILEVER |
摘要 |
A method for manufacturing a fine cantilever having a cantilever and a probe provided on the cantilever can comprise the steps of: providing a probe mold having a groove, which accommodates a liquid-state probe solution for the probe and corresponds to the shape of the probe; making the cantilever come into contact with the probe mold having the groove by corresponding to the probe position; forming the probe on the cantilever by hardening the probe solution accommodated in the groove in a state in which the cantilever makes contact with the probe mold; and separating the cantilever from the probe mold. |
申请公布号 |
WO2016017866(A1) |
申请公布日期 |
2016.02.04 |
申请号 |
WO2014KR12112 |
申请日期 |
2014.12.10 |
申请人 |
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANGUNIVERSITY |
发明人 |
LEE, JUNG CHUL;SONG, JUNG KI;LEE, IL |
分类号 |
G01Q70/16 |
主分类号 |
G01Q70/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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