发明名称 METHOD FOR MANUFACTURING FINE CANTILEVER
摘要 A method for manufacturing a fine cantilever having a cantilever and a probe provided on the cantilever can comprise the steps of: providing a probe mold having a groove, which accommodates a liquid-state probe solution for the probe and corresponds to the shape of the probe; making the cantilever come into contact with the probe mold having the groove by corresponding to the probe position; forming the probe on the cantilever by hardening the probe solution accommodated in the groove in a state in which the cantilever makes contact with the probe mold; and separating the cantilever from the probe mold.
申请公布号 WO2016017866(A1) 申请公布日期 2016.02.04
申请号 WO2014KR12112 申请日期 2014.12.10
申请人 INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANGUNIVERSITY 发明人 LEE, JUNG CHUL;SONG, JUNG KI;LEE, IL
分类号 G01Q70/16 主分类号 G01Q70/16
代理机构 代理人
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