| 摘要 |
The objective of the present invention is to manufacture an acceleration device and a mass analysis device inexpensively and with a compact size, enabling them to be used by any person. The mass analysis device (300) is configured from a plurality of substrates, including a first main substrate (301), a first upper substrate (302) adhered to the upper surface of the first main substrate (301), and a first lower substrate (303) adhered to the lower surface of the first main substrate (301). A mass analysis chamber (308) is a passage formed in the first main substrate (301) and running from the upper surface of the first main substrate (301) to the lower surface of the first main substrate (301), and enclosed in the direction perpendicular to the substrate surfaces (the Z direction) by the upper substrate (302) and the lower substrate (303), enclosed on both sides in the direction (the direction X) which is orthogonal to the Z direction and is the direction of advance of charged particles (318) by first main substrate side plates (301-4, 301-5), and enclosed on both side surfaces in the direction (the Y direction) orthogonal to the Z direction and the X direction by the first main substrate (301). A center hole (310-4) is opened in the first main substrate side plate (301-4) to which the charged particles (318) are incident, and the charged particles (318) enter the mass analysis chamber (308) from the center hole (310-4) formed in the first main substrate side plate (301-4). |
