VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND ORGANIC EL ELEMENT

摘要

This vapor deposition device (11) is provided with: first and second vapor deposition sources (12) and (13); a common piping (27) that is connected to the first and second vapor deposition sources (12) and (13); a vapor deposition particle emission source (29) that is connected to the common piping (27) and emits vapor deposition particles from the first and second vapor deposition sources (12) and (13); an exhaust valve (32) that is connected to the vapor deposition particle emission source (29); and an exhaust pump (34) that is connected to the exhaust valve (32).