发明名称 DIAGNOSTIC METHOD FOR FILM THICKNESS SENSOR, AND FILM THICKNESS MONITOR
摘要 [Problem] To provide a diagnostic method for a film thickness sensor, said diagnostic method making it possible to correctly determine a service life of a crystal oscillator, and to provide a film thickness monitor. [Solution] According to one embodiment of the present invention, a diagnostic method for a film thickness sensor is a diagnostic method for a film thickness sensor (14) having a crystal oscillator (20). In the method, the crystal oscillator (20) mounted on a sensor head is oscillated, fluctuation range of change rates of oscillation frequencies of the crystal oscillator (20) is measured, and when the fluctuation range exceeds a predetermined value, it is determined that the crystal oscillator (20) cannot be used.
申请公布号 WO2016017108(A1) 申请公布日期 2016.02.04
申请号 WO2015JP03643 申请日期 2015.07.21
申请人 ULVAC, INC. 发明人 ITOU, ATSUSHI;ENDO, JIROU
分类号 G01B17/02;C23C14/24;C23C14/54;G01N5/02 主分类号 G01B17/02
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