发明名称 METHOD FOR PRODUCING OPTOELECTRONIC SEMICONDUCTOR CHIPS
摘要 The method is designed to produce optoelectronic semiconductor chips (1) and comprises the following steps: - growing a semiconductor layer sequence (3) on a growth substrate (2), - applying at least one metallization (4) to a contact side (34) of the semiconductor layer sequence (3), which contact side faces away from the growth substrate (2), - applying an intermediate carrier (6) to the semiconductor layer sequence (3), wherein a sacrificial layer (5) is applied between the intermediate carrier (6) and the semiconductor layer sequence (3), - removing the growth substrate (2) from the semiconductor layer sequence (3), - structuring the semiconductor layer sequence (3) into individual chip regions (33), - at least partially dissolving the sacrificial layer (5), and - subsequently removing the intermediate carrier (6).
申请公布号 WO2016016098(A1) 申请公布日期 2016.02.04
申请号 WO2015EP66919 申请日期 2015.07.23
申请人 OSRAM OPTO SEMICONDUCTORS GMBH 发明人 ZINI, LORENZO;FREY, ALEXANDER;HERTKORN, JOACHIM;HAHN, BERTHOLD
分类号 H01L33/00 主分类号 H01L33/00
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