MANUFACTURING METHOD FOR A PIEZOELECTRIC LAYER ARRANGEMENT AND CORRESPONDING PIEZOELECTRIC LAYER ARRANGEMENT

摘要

A manufacturing method is provided for a piezoelectric layer arrangement and a corresponding piezoelectric layer arrangement. The manufacturing method includes the steps: depositing a first electrode layer on a substrate; depositing a first insulating layer on the first electrode layer; forming a through opening in the first insulating layer to expose the first electrode layer within the through opening; depositing a piezoelectric layer on the first insulating layer and on the first electrode layer within the through opening; back-polishing the resulting structure to form a planar surface, on which a piezoelectric layer area, surrounded by the first insulating layer, is exposed; and depositing and structuring a second electrode layer on the first insulating layer, which contacts the piezoelectric layer area.

主权项

1. A manufacturing method for a piezoelectric layer arrangement, comprising:
depositing a first electrode layer on a substrate; depositing a first insulating layer on the first electrode layer; forming a through opening in the first insulating layer to expose the first electrode layer within the through opening; depositing a piezoelectric layer on the first insulating layer and on the first electrode layer within the through opening in order to produce a resulting structure; back-polishing the resulting structure to form a planar surface, on which a piezoelectric layer area surrounded by the first insulating layer is exposed; and depositing and structuring a second electrode layer on the first insulating layer, the second electrode layer contacting the piezoelectric layer area.