发明名称 Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source
摘要 An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
申请公布号 US2016033547(A1) 申请公布日期 2016.02.04
申请号 US201514734942 申请日期 2015.06.09
申请人 Bruker Nano, Inc. 发明人 Raschke Markus B.;Kaemmer Stefan B.;Minne Stephen C.;Su Chanmin
分类号 G01Q20/02;G01Q60/38 主分类号 G01Q20/02
代理机构 代理人
主权项 1. A method of ultrafast spectroscopy comprising: plasmonic nanofocusing electromagnetic waves directed at an AFM tip, the AFM tip interacting with a sample; and controlling dynamic interactions of the sample on the nanoscale using the nanofocusing step; and wherein the sample is at least one of molecular and solid matter.
地址 Santa Barbara CA US
您可能感兴趣的专利