| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a protective film formation device capable of coating regions in which different workpieces exist with respective different liquid resins. <P>SOLUTION: A protective film formation device comprises: workpiece holding means; first liquid resin spraying means 70a for spraying a first liquid resin to a workpiece as a fine particle and second liquid resin spraying means 70b for spraying a second liquid resin to the workpiece as the fine particle; processing feed means for relatively moving the liquid resin spraying means 70 and the workpiece holding means in a processing feed direction (X-axis direction); indexing feed means for moving the liquid resin spraying means 70 and the workpiece holding means in an indexing feed direction (Y-axis direction) orthogonal to the X-axis direction; X-axis direction position detection means for detecting a relative position relationship between liquid resin spraying means 70 and the workpiece holding means; Y-axis direction position detection means for detecting a relative position relationship between the liquid resin spraying means 70 which relatively moves in the Y-axis direction and the workpiece holding means; and control means for controlling the spraying means on the basis of a detection signal from the X-axis direction position detection means and the Y-axis direction position detection means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
