DATA AMENDING APPARATUS, DRAWING APPARATUS, INSPECTING APPARATUS, DATA AMENDING METHOD, DRAWING METHOD, INSPECTING METHOD AND RECORDING MEDIUM STORING A PROGRAM

摘要

A data correction unit (21) comprises: a design data memory unit (211) which memories design data of a pattern formed by etching on a substrate; an etching property memory unit (212) which memories a plurality of etching properties corresponding to a plurality of reference positions, respectively based on the substrate; an area etching property acquisition unit (213) obtaining area etching properties of each divided area based on each position relation of each divided area on the substrate and a plurality of reference positions; a divided data correcting unit (214) which divides design data into a plurality of divided data corresponding to a plurality of divided area, and corrects each of divided data based on etching properties of each of divided data. Thus, etching correction about each of divided data can be accurately performed in consideration of the difference in etching properties depending on the difference in the position on the substrate of each of divided area.