| 摘要 |
According to the present invention, a single platform substrate-processing system for dry and wet processes performs dry and wet processes at a single platform, thereby preventing a substrate to be treated from being polluted and minimizing a bottom area of the system. In addition, the substrate-processing system of a single platform can reduce system construction costs or maintenance costs in comparison with a method of independently constituting and operating a dry processing system and a wet processing system. The single platform substrate-processing system includes: a front end module in which the substrate to be treated stands by; a dry processing module for dry-processing the substrate to be treated; a wet processing module for wet-processing the substrate to be treated; a first substrate transferring module for loading/unloading the substrate to be treated in/from the front end module; and a second substrate transferring module for receiving the substrate to be treated from the first substrate transferring module and loading the substrate to be treated to the dry processing module, unloading the dry-processed substrate to be treated from the dry processing module and loading the dry-processed substrate to be treated to the wet processing module, and unloading the wet-processed substrate to be treated and transferring the wet-processed substrate to be treated to the first substrate transferring module. |
