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发明名称
剥離システム
摘要
申请公布号
JP5850814(B2)
申请公布日期
2016.02.03
申请号
JP20120197214
申请日期
2012.09.07
申请人
東京エレクトロン株式会社
发明人
平河 修
分类号
H01L21/677;H01L21/02;H01L21/304;H01L21/683
主分类号
H01L21/677
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代理人
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