A PLASMA GENERATING MODULE AND PLASMA PROCESS APPARATUS COMPRISING THE SAME

摘要

The present invention provides a plasma generation module and a plasma processing apparatus comprising the same. The plasma generation module comprises: an antenna installation unit having an internal space; a plurality of antennae arranged in the antenna installation unit; a power source unit arranged outside the antenna installation unit to supply high frequency power to the antennae; a plurality of input units whose one ends are connected to one sides of the antennae and whose the other ends are connected to one side of the power source unit; and a first connector positioned outside the antenna installation unit and disposed on the input units to connect and disconnect the input units. Time for assembling the module or the apparatus can be shortened. Also, when maintaining and repairing the apparatus, access is secured to shorten time required for maintenance and repair work since circuits and other parts except the antennae are arranged outside the antenna installation unit. Furthermore, an arrangement of a capacitor can be easily changed when needed to allow flexible operation.