发明名称 部品βの製造方法
摘要 This component manufacturing method sequentially comprises at least: a step (A1) of forming, by sputtering, an alloy film having tin as a principal component on one surface of a substrate, using a substrate in which one surface comprises nickel; a step (A3) of placing a component, in which at least a portion that comes into contact with the alloy film comprises copper or comprises nickel-coated aluminum, on the alloy film; and a step (A4) of applying heat treatment in order to bond the substrate and the alloy film to each other and the alloy film and the component to each other. In step (A1), a cathode electrode and an anode electrode are arranged opposite each other in a space having a reduced-pressure atmosphere, the cathode electrode being provided with an alloy target having tin as a principal component, and the anode electrode being provided with the substrate; and a DC voltage is applied to the cathode electrode when the alloy film is being formed on the aforementioned one surface of the substrate.
申请公布号 JP5851510(B2) 申请公布日期 2016.02.03
申请号 JP20130529016 申请日期 2012.08.13
申请人 株式会社アルバック 发明人 中牟田 雄;松本 昌弘;稲垣 貴之;平松 大典;谷 典明
分类号 H01L21/60;C23C14/06;C23C14/34;H01L23/12;H05K3/34 主分类号 H01L21/60
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