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发明名称
研削装置
摘要
申请公布号
JP5850759(B2)
申请公布日期
2016.02.03
申请号
JP20120025827
申请日期
2012.02.09
申请人
株式会社ディスコ
发明人
安藤 滋;長嶋 政明
分类号
B24B41/06;B24B7/04;B24B49/10;H01L21/304
主分类号
B24B41/06
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