MAGNET SLIDING CLAMPING APPARATUS

摘要

The present invention presents a clamping device sliding on a magnet, comprising: a base of which at least a portion is fixated to a substrate transferring frame; a substrate holder which is provided at an upper side of the base and moves along a surface of the base; a substrate clamp which is provided at an upper side of the substrate holder and clamps a substrate; and a magnet member which is provided between the base and the substrate holder and restores a location of the substrate holder using magnetic force. The present invention can prevent generation of particles and relieve the shock.