| 摘要 |
A scheduling method suitable for a single-substrate type substrate treating apparatus is provided. In the scheduling method, a controller provided in the substrate treating apparatus prepares schedule defining performances of the substrate treating apparatus having a single-substrate type treating unit in a time sequential order. The method comprises the steps of: a step for preparing a plurality of tentative timetables for a plurality of respective substrates, each of the tentative timetables combining a plurality of blocks in a time sequential order, each of the blocks defining a treatment content for one of the substrates; and a scheduling step for preparing a total schedule by acquiring the blocks from the plurality of tentative timetables to dispose the acquired blocks in a time sequential order. |
