发明名称 モールド及びその製造方法
摘要 According to one embodiment, a mold includes a base, a first concave pattern, a second concave pattern, and a third concave pattern. The base includes a first surface and a pedestal projecting from the first surface. The pedestal includes a first region and a second region disposed outside the first region. The first concave pattern is formed in the first region. The second concave pattern is formed in the second region. The third concave pattern extends from the first region to the second region.
申请公布号 JP5851442(B2) 申请公布日期 2016.02.03
申请号 JP20130063101 申请日期 2013.03.25
申请人 株式会社東芝 发明人 竹川 陽子;稲浪 良市;浅野 昌史;高畑 和宏;小林 幸子;野嶋 茂樹;古殿 瑶子;鈴木 理人;許斐 堅嗣
分类号 H01L21/027;B29C33/42;B29C59/02 主分类号 H01L21/027
代理机构 代理人
主权项
地址