发明名称 PROCESS FOR MANUFACTURING A COMPOSITE STRUCTURE
摘要 The disclosure relates to a process for manufacturing a composite structure, the process comprising the following steps: a) providing a donor substrate and a carrier substrate; b) forming a dielectric layer; c) forming a covering layer; d) forming a weakened zone in the donor substrate; e) joining the carrier substrate and the donor substrate via a contact surface having an outline; f) fracturing the donor substrate via the weakened zone, steps b) and e) being executed so that the outline is inscribed in the outline, and step c) being executed so that the covering layer covers the peripheral surface of the dielectric layer.
申请公布号 EP2979296(A1) 申请公布日期 2016.02.03
申请号 EP20140718659 申请日期 2014.03.21
申请人 SOITEC 发明人 KERDILES, SÉBASTIEN;CHABANNE, GUILLAUME;BOEDT, FRANÇOIS;PIERRET, AURÉLIE;SCHNEIDER, XAVIER;LANDRU, DIDIER
分类号 H01L21/62 主分类号 H01L21/62
代理机构 代理人
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