| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of adjusting a vacuum processing apparatus capable of improving efficiency in process by performing teaching with high work efficiency and high precision. <P>SOLUTION: A specimen for adjustment which has a specific point at which a characteristic of reflection of the light of specified wavelength is locally varied, on the upper surface, is placed in such manner as a specific position of the upper surface of a sample stage is aligned with the specific point. Then, a robot is moved under such condition as the interior of a vacuum vessel is sealed and arranged at a specified position on the arm of the robot. A passing part of the light of the predetermined wavelength which has been reflected is moved above the specific point of the specimen for adjustment. At the time of movement, the light that has passed the passing part from the specimen for adjustment is detected outside a plate member. According to the amount of light that has been detected, the specific point of the specimen is aligned with a predetermined position of the robot. <P>COPYRIGHT: (C)2012,JPO&INPIT |
