发明名称 |
IMAGING SYSTEM |
摘要 |
The present invention provides an imaging system capable of reducing the generation of interference patterns in a state in which a beam of highly coherent electromagnetic waves is enlarged to a prescribed illumination area and used for illumination by moving the prescribed illumination region within a range of motion that is smaller than the illumination region. |
申请公布号 |
EP2980561(A1) |
申请公布日期 |
2016.02.03 |
申请号 |
EP20140773413 |
申请日期 |
2014.03.19 |
申请人 |
NEC CORPORATION |
发明人 |
ISHI, TSUTOMU;SUDOU, TAKAYUKI;TSUBOI, TAKU |
分类号 |
G01N21/3581;G01N21/88;G01N21/94;G01N33/02 |
主分类号 |
G01N21/3581 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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