| 摘要 |
<p>A turbo molecular vacuum pump comprises a pumping mechanism and an accelerometer. The accelerometer 116 senses when the pumping mechanism is exposed to acceleration forces which may be damaging to the pump. The strength of the forces is determined by a comparator 124. The total number of events is added by counter 130 and a total is displayed 132. The total may represent an actual number of events, or may be representative of the cumulative severity of the events. Pump maintenance (e.g. replacement of the back up bearing) may be required when a predetermined total is reached.</p> |
