Resonator element, resonator, oscillator, and electronic device

摘要

A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

主权项

1. A resonator element, comprising:
a base that has:
a notch and a connection section that are provided next to each other in a first direction;a first base part connected to the connection section at one side of the connection section; anda second base part connected to the connection section at another side of the connection section; a resonating arm that extends from the first base part in a second direction intersecting with the first direction; and a support connected to the second base part, wherein the notch extends from a side surface of the connection section in the first direction, a first outer periphery of the first base part and a second outer periphery of the second base part define the notch, and the first and second outer peripheries extend from the side surface of the connection section to an open end of the notch, the notch has a first space, which has a first notch width between the first and second outer peripheries in the second direction, proximate the side surface of the connection section, a second space, which has a second notch width between the first and second outer peripheries in the second direction, proximate the open end of the notch, and a third space, which has a third notch width between the first and second outer peripheries in the second direction, therebetween, and a third angle between the first outer periphery located in the third space and a first imaginary line extending in the first direction is smaller than first and second angles respectively between second and third imaginary lines parallel to the first imaginary line and the first outer periphery respectively located in the first and second spaces.