发明名称 Semiconductor device with compressive layers
摘要 A semiconductor device includes a substrate having a first side and a second side opposite the first side. The substrate has a sensor region proximate the first side. The semiconductor device also includes a first compressive layer over the second side of the substrate. The semiconductor device further includes a light blocking element over the first compressive layer. The semiconductor device additionally includes a second compressive layer over the first compressive layer and covering a portion of the light blocking element. The semiconductor device also includes a third compressive layer between the second compressive layer and the portion of the light blocking element.
申请公布号 US9252296(B2) 申请公布日期 2016.02.02
申请号 US201514713559 申请日期 2015.05.15
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 Tsao Chun-Han;Lai Chih-Yu;Huang Chih-Hui;Wu Cheng-Ta;Tu Yeur-Luen;Wang Ching-Chun;Ting Shyh-Fann;Tsai Chia-Shiung
分类号 H01L31/102;H01L21/00;H01L31/0216;H01L51/42;H01L27/146;H01L27/148 主分类号 H01L31/102
代理机构 Hauptman Ham, LLP 代理人 Hauptman Ham, LLP
主权项 1. A semiconductor device, comprising: a substrate having a first side and a second side opposite the first side, the substrate having a sensor region proximate the first side; a first compressive layer over the second side of the substrate; a light blocking element over the first compressive layer; a second compressive layer over the first compressive layer and covering a portion of the light blocking element; and a third compressive layer between the second compressive layer and the portion of the light blocking element.
地址 TW