发明名称 |
Semiconductor device with compressive layers |
摘要 |
A semiconductor device includes a substrate having a first side and a second side opposite the first side. The substrate has a sensor region proximate the first side. The semiconductor device also includes a first compressive layer over the second side of the substrate. The semiconductor device further includes a light blocking element over the first compressive layer. The semiconductor device additionally includes a second compressive layer over the first compressive layer and covering a portion of the light blocking element. The semiconductor device also includes a third compressive layer between the second compressive layer and the portion of the light blocking element. |
申请公布号 |
US9252296(B2) |
申请公布日期 |
2016.02.02 |
申请号 |
US201514713559 |
申请日期 |
2015.05.15 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
Tsao Chun-Han;Lai Chih-Yu;Huang Chih-Hui;Wu Cheng-Ta;Tu Yeur-Luen;Wang Ching-Chun;Ting Shyh-Fann;Tsai Chia-Shiung |
分类号 |
H01L31/102;H01L21/00;H01L31/0216;H01L51/42;H01L27/146;H01L27/148 |
主分类号 |
H01L31/102 |
代理机构 |
Hauptman Ham, LLP |
代理人 |
Hauptman Ham, LLP |
主权项 |
1. A semiconductor device, comprising:
a substrate having a first side and a second side opposite the first side, the substrate having a sensor region proximate the first side; a first compressive layer over the second side of the substrate; a light blocking element over the first compressive layer; a second compressive layer over the first compressive layer and covering a portion of the light blocking element; and a third compressive layer between the second compressive layer and the portion of the light blocking element. |
地址 |
TW |