Polishing pad with alignment feature

摘要

Polishing pads with alignment marks are described. Methods of fabricating polishing pads with alignment marks are also described.

主权项

1. A method of fabricating a polishing pad for polishing a substrate, the method comprising:
mixing a pre-polymer and a curative to form a mixture in the base of a formation mold; moving the lid of the formation mold into the mixture, the lid having disposed thereon a pattern of protrusions and an alignment forming feature; and, with the lid placed in the mixture, at least partially curing the mixture to form a molded homogeneous polishing body comprising a polishing surface having a pattern of grooves comprising a polishing region with an alignment feature disposed therein, corresponding to the pattern of protrusions and the alignment forming feature of the lid, wherein the alignment feature creates a singular asymmetry within the pattern of grooves.