| 主权项 |
1. An electron microscope plasma cleaner for cleaning an electron microscope by using plasma, the electron microscope adapted to magnify an image of a sample through an electron beam, the electron microscope plasma cleaner comprising:
a vacuum chamber in which the sample is disposed, the interior of the vacuum chamber being in a vacuum state to utilize electron current; an electron gun for producing the electron beam and outputting the produced electron beam to the sample; an electron lens for magnifying the electron beam transmitting the sample and projecting the electron beam onto a fluorescent screen; a radio frequency controller for producing a first signal having radio frequency within a given range; and a plasma head for producing the plasma, receiving the first signal from the radio frequency controller, producing activated oxygen radicals and ions by using the plasma and the first signal, and supplying the activated oxygen radicals and ions to the interior of the vacuum chamber, wherein contaminants existing in the interior of the vacuum chamber are removed with the activated oxygen radicals and ions supplied to the interior of the vacuum chamber, wherein the contaminants comprise hydrocarbons, native oxide formed when the sample is kept in the air, oil, and sample outgas, wherein at least one of the activated oxygen radicals and ions reacts to the contaminants to produce H2O or CO2, wherein the contaminants are discharged to the outside of the vacuum chamber by using motion energy becoming high by means of the production of H2O or CO2, wherein the ions supplied to the interior of the vacuum chamber are bonded to the static electricity formed on the vacuum chamber and the sample, thus removing the static electricity, wherein the vacuum chamber is a sample exchange chamber (SEC), wherein the contaminants comprise one of native oxide formed when the sample disposed in the sample exchange chamber (SEC) is kept in the air, oil, and sample outgas, wherein the plasma head comprises a plasma electrode having a plurality of cups laid on each other, each cup having a plurality of holes formed on every surface thereof, so that the reaction area with a first gas producing the plasma is maximized through the plurality of cups and the plurality of holes, and wherein the plasma head comprises a multi gas injection nozzle disposed on the front surface thereof to inject the first gas therefrom, thus assisting the production of the plasma. |
